Moscone Center
San Francisco, California

HORIBA Booth: #517 (South Hall)

2008/7/15 - 2008/7/17

Wet Cleaning (Front & Back End Of Line)

·Low-concentration HF/HCl/NH3 monitor HF-960M

·Carbon sensor resistivity meter HE-960R-GC

·(2-channel) HE-960RW-GC

·Conductivity meter (High concentration type) HE-480H
·Conductivity meter (Low concentration type) HE-480C
·TMAH Conductivity meter HE-960TM
·Dissolved Ozone monitor HZ-960
·High Sensitive HF concentration monitor
  in Diluted sulfuric acid / Hydrogen Peroxide
HF-700

Utility

·High-sensitivity Silica Monitor SLIA-300

·2channel Resistivity Meter HE-960RW

·Dissolved Oxygen monitor SD-300
·

HORIBA Group:

HORIBA

HORIBA STEC