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	CM-200/210
	Specifications

Hydrofluoric Acid Monitor

CM-200/210

Overview

The CM-200/210 are highly precise hydrofluoric acid monitors that were developed to monitor hydrofluoric acid resulting from the manufacture of semiconductors. The devices measure the concentration of hydrofluoric acid through the use of electromagnetic induction conductivity meters and display measurement results in real time. The CM-200/210 are prevalently used in the production process, which uses hydrofluoric acid in such processes as the washing of etched wafers.

Features

The device has an range of error of less than ±2%F.S. within the low range of 0wt% to 1wt% and is optimally suited to determine degree and region of concentration in a memory production line.

The submersible sensor is completely covered by a PFA resin mold so there is no risk of metal corrosion with the hydrofluoric acid.

In order to reliably manage the process, the device is equipped with various kinds of warning systems.

The CM-200 has a submersible-type sensor, and the CM-210 has a flow-type sensor.

For Semiconductor / LCD Manufacturing Processes Water Quality Meters

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Products

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The HF-960M uses sensors that offer outstanding corrosion resistance for high-precision, and is thus perfect for single-bath and wafer cleaning.

High Sensitive HF Concentration Monitor in Diluted sulfuric acid / Hydrogen peroxide
HF-700

The HF-700 stabilizes hydrofluoric concentrations on the order of ppm in diluted sulfuric acid and hydrogen peroxide

Inline Dissolved Ozone Monitor
OZ-96i

Ideal for ozone fluid density control in semiconductor production processes

Dissolved Ozone Monitor
OZ-96

The OZ-96 is able to cover a broad measuring range from low concentrations to high concentrations.

TMAH Conductivity Meter
HE-960TM

HE-960TM offers High precision measurement of the conductivity of TMAH (Tetra Methyl Ammonium Hydroxide) solutions.

IPA Resistivity Meter
IP-960

This meter enables IPA to be controlled to high purity to maintain and enhance the performance of IPA vapor (vapour) drying systems.

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