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For Ultra-Pure Water
2-Channel Resistivity Meter
HE-960RW
High-precision temperature compensation function
for measuring ultra-pure water resistivity
Overview
This resistivity meter is ideal for such applications as the high-precision water monitoring employed at ultra-pure water plants used in semiconductor manufacturing.
They utilize newly designed, high-precision, high-stability temperature measurement circuitry and a vastly improved temperature compensation function, an important element for measuring the resistivity of ultra-pure water.
Features
• Highly precise, highly stable temperature compensation function
- Control fluctuations in measured values in the region of 18 MΩ·cm resistivity to within a minimum 0.02 MΩ·cm over a water temperature range of 15°C to 35°C.
 Resistivity sensor code chart
• 50 m extension possible for sensor cables
• 2-channel simultaneous measurement
• Independent 4 contact alarms
• Abundant in-house calibration equipment
- HORIBA Advanced Techno resistivity meters are only shipped after cellconstant inspection is performed on
the resistivity sensors and inspectionfor temperature sensor instrumental errors is implemented using calibration equipment that has been adjusted with high-traceability reference equipment.
- The sensors can also be combined with a converter for integrated calibration in advance of shipping.
• Communication device ability (RS-485)
• Utilization of lead-free solder
Applications
• 2-channel simultaneous measurement
The HE-960RW employs independent internal circuits for connecting
two sensors to a single converter, allowing two independent
resistivity measurements as well as desalination rate calculation
and output for two separate locations.
• Communication device ability
The HE-960RW is equipped with an RS-485 interface to allow you
to check measurements and check / change the set points by
communication.
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