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	HE-960TM
	Specifications

TMAH Conductivity Meter

HE-960TM

Perfect for Controlling TMAH Developer Concentrations

Overview

The HE-960TM offers high precision measurement of the conductivity of TMAH (Tetra Methyl Ammonium Hydroxide) solutions, the main component of the photoresist developer that is used in semiconductor and liquid crystal processes.
The HE-960TM is also an environmentally-friendly product that uses lead-free solder for mounting chips on the PCB. And, with its 4-electrode FES-126Ni dedicated sensor, this unit has a high chemical resistance and offers a wide range of measurement, perfect conditions for measuring TMAH.

Features

•Wide measurement range
Range width: 0 to 200 mS/cm

•Chemically-resistant sensor
Body: PVDF, Electrodes: Nickel

•Temperature measurement, simultaneous display function
The HE-960TM is equipped with a function for inputting the deviation of the platinum temperature resistor (Pt1000Ω) and offers both temperature measurement and display.

•Free transmission output range
Analog output on the HE-960TM can be freely divided.

•Security function
By setting a passcode, all key operation can be locked to prevent measurement errors caused by inadvertent operation.

•Utilization of lead-free solder
Lead-free solder is used for mounting chips on the PCB according to the RoHS directive.

•CE Marking compliant

For Semiconductor / LCD Manufacturing Processes Water Quality Meters
TMAH Conductivity Meter HE-960TM
Conductivity Meter / Resistivity Meter

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Products

Sanitary Conductivity Meter (Wide-Range type)
HE-960HS

For accurate management of concentrations over a wide range of measurements.

2-Channel
Conductivity Meter
(For Low concentrations)
HE-960CW

Ideal for the conductivity control of the pasteurized water, and WFI in pharmaceuticals production

Conductivity meter
(For high concentrations)
HE-480H

Continuous measurement of conductivity, salinity of salt water, and temperature is possible.

Conductivity meter
(For low concentrations)
HE-480C

Highly functional device compatible with a wide range of applications from management of boiler water to semiconductor pure water.

Conductivity meter
(For high concentrations)
CEH-200

This design fulfills basic specifications while raising the bar in terms of ease of operation.

Conductivity meter
(For low concentrations)
CE-200C

Rainproof structure that allows field pure water measurements

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