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For Semiconductor wet process / High Sensitive HF Concentration Monitor / in Diluted sulfuric acid/Hydrogen peroxide / HF-700



Featuresimage

Enables management of hydrofluoric concentrations
in diluted sulfuric acid and hydrogen peroxide at the ppm level.

Management of hydrofluoric concentrations at the ppm level is extremely important for the solution of diluted sulfuric acid, hydrogen peroxide and a small amount of hydrofluoric acid that plays an effective role in the removal of the polymer residue following the etching process. If the concentration is too low, the polymer removal effect is weakened. If it is too high, it causes excessive etching. The HF-700 stabilizes hydrofluoric concentrations on the order of ppm in diluted sulfuric acid and hydrogen peroxide to enable continuous measurement and allow effective process management.

  • Stable and continuous measurement
  • Multiple measurement modes to fit the application

The standard mode / A reagent-saving mode / A continuous measurement mode / An intermittent measurement mode

  • Easy electrode replacement


Specificationsimage

Measuring method Fluoride ion electrode method
Measuring range 0 to 1000mg/L
Sample condition Sulfuric acid concentration : 2 to 15wt%
Peroxide concentration : 0 to 20wt%
Temperature : 10 to 35 degree C


Informationimage

HF/HCl/NH3 Concentration Monitor HF-960M
Hydrofluoric Acid Monitor CM-200/210
SPM Monitor CS-150

SEMICON Japan 2007 (2007.12.5 to 12.7, Chiba)

Products for Semiconductor wet process



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