 |
|
|
Low Concentration Type HF/HCl/NH3 Concentration Monitor
HF-960M
High Precision Measurement of Low-Concentration Hydrofluoric Acid, Hydrochloric Acid and Ammonia
Overview
Along with the evolution of 65 nm and 45 nm devices, the chemical solutions conventionally used in RCA cleaning are requiring greater and greater low-concentration control.
The HF-960M uses sensors that offer outstanding corrosion resistance for high-precision, high-speed measurement of low concentrations of hydrofluoric acid, hydrochloric acid and ammonia, and is thus perfect for single-bath and wafer cleaning. The HF-960M is also an environmentally-friendly product that uses lead-free solder for mounting chips on the PCB.
Features
•Precise measurement of low HF concentrations
The HF-960M reduces measurement errors to just
±25 ppm in the 0 to 5,000 ppm range.
The display is designed to give precise ppm readings when performing low concentration measurements.
•5 types of measurement available: HF, HCl & NH3 concentrations, conductivity, and temperature
Temperature compensation measurement is carried out for HF, HCl & NH3 concentrations based on the data for each temperature characteristic. The HF-960M can even be used as a conductivity meter for low-concentration dilution control of other chemical solutions as well.
•The analog output range can be arbitrarily set with to the concentration measuring range.
The analog output range can be specified between 0 and 200% of the measuring range. Thus, finer concentration values can be output.
•Diverse output
The HF-960M provides 7 output points. These include not only upper and lower concentration limits, but output on concentration meter errors, defective sample measurements, and more, for a truly diverse range of output.
•3-channel transmission output
Three transmission output systems are built into the HF-960M, allowing the desired data to be assigned from among HF, HCl & NH3 concentrations, conductivity, and temperature.
•Utilization of lead-free solder
Lead-free solder is used for mounting chips on the PCB according to the RoHS directive.
•DC 24 V Power Source
•CE Marking compliant
|
|
