Semiconductor / FPD
Categories
Ultra-Pure Water Process
Wet Process
HF/HCl/NH3 Monitor
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HF/HCｌ/NH3 Concentration Monitor : HF-960M
High Sensitive HF Concentration Monitor in Diluted sulfric acid / Hydrogen peroxide
Hydrofluoric Acid Monitor : CM-200/210
Resistivity Meter
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Resistivity Meter : HE-480R
2-channel Resistivity Meter (for ultra-pure water): HE-960RW
2-channel Resistivity Meter (for ultra-pure water): OE-96RW
Carbon Sensor Resistivity Meter (chemical resistance): HE-960R-GC
IPA Resistivity Meter : IP-960
Conductivity Meter
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Conductivity Meter ( Low Concentration type): HE-480C
Conductivity Meter ( High Concentration type): HE-480H
2-channel Conductivity Meter ( Low Concentration type): HE-960CW
TMAH Conductivity Meter : HE-960TM
Dissolved Ozone Monitor
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in-situ Dissolved Ozone Monitor : OZ-96i
Dissolved Ozone Monitor : OZ-96
Ultra-Pure Water Process
Silica Monitor : SLIA-300
Dissolved Oxygen Monitor : SD-300
Particle Sensor : PLCA-800
2-channel Resistivity meter : HE-960RW
Online TOC Analyzer : HT-100
Ultra-pure Water process
Wet Process
High Sensitive HF Concentration Monitor in Diluted sulfuric acid / Hydrogen peroxide : HF-700
HF/HCｌ/NH3 Concentration Monitor : HF-960M
Carbon Sensor Resistivity Meter : HE-960R-GC
TMAH Conductivity Meter : HE-960TM
Dissolved Ozone Monitor : OZ-96i
IPA Resistivity Meter : IP-960
FEOL and BEOL Chemical monitoring in wet process
Wastewater Treatment
Simple Fluoride Ion Monitor : IF-250
Products Line-up
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