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	OE-960-CE
	Specifications

Resistivity Meter

OE-960-CE

Overview

Semiconductor production technology is achieving increasingly high levels of integration. Ultra-pure water, approaching as close to theoretically pure water as possible, is required for the production of super-LSI. This resistivity meter is equipped with a microprocessor for the realization of highly precise measurement of ultra-pure water.

Features

- Realization of highly precise temperature compensation
- Two built-in types of temperature characteristics
- Arbitrary setting of reference temperature
- Temperature measurement function also provided
- Simultaneous display of measured values and parameter settings
- Memory backup
- Compatible with CE marking

Products

2-Channel
Resistivity Meter
HE-960RW

Achieve the advanced control of ultra-pure water, which is optimum for production of ultra-pure water

Resistivity Meter
HE-480R

Highly functional device compatible with a wide range of applications from management of boiler water to semiconductor ultra-pure water.

Carbon Sensor
Resistivity Meter
HE-960R-GC

Chemical resistant sensor that prevents metallic contamination and controls the washing process at a high level

IPA Resistivity Meter
IP-960

This meter enables IPA to be controlled to high purity to maintain and enhance the performance of IPA vapor (vapour) drying systems.

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