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For Ultra-Pure Water
2-Channel Resistivity Meter
OE-96RW
High-precision temperature compensation function
for measuring ultra-pure water resistivity
Overview
This resistivity meter is ideal for such applications as the high-precision water monitoring employed at ultra-pure water plants used in semiconductor manufacturing.
They utilize newly designed, high-precision, high-stability temperature measurement circuitry and a vastly improved temperature compensation function, an important element for measuring the resistivity of ultra-pure water.
Features
Highly precise, highly stable temperature compensation function
Highly precise temperature measurement is enabled through high-precision platinum temperature resistors (Pt 1,000Ω) and constant current circuitry.
Control fluctuations in measured values in the region of 18 MΩ·cm resistivity to within a minimum 0.02 MΩ·cm over a water temperature range of 15°C to 35°C.
50 m extension possible for sensor cables
2-channel simultaneous measurement
Independent 2-channel alarms
Abundant in-house calibration equipment
HORIBA Advanced Techno resistivity meters are only shipped after cellconstant inspection is performed on
the resistivity sensors and inspectionfor temperature sensor instrumental errors is implemented using calibration equipment that has been adjusted with high-traceability reference equipment.
The sensors can also be combined with a converter for integrated calibration in advance of shipping.
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