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	OZ-96i
	Specifications

In-situ Dissolved Ozone Monitor

OZ-96i

Ideal for ozone fluid density control in semiconductor production processes

Overview

Measures the density of the ozone fluid that is used for cleaning and oxide film formation, etc. This is an ozone fluid temperature monitor that can be attached to a main pipe and allows continuous measurement. No bypass line is required for measurement. This product performs approximate measurement by using an ozone generator and a Use Point.

Features

Can be attached in a line
Selectable from three pipe diameter types
Transmission output with any settings
Can change the number of digits below the decimal point
Zero-point stability
Compact sensor size
DC 24V power supply
Can withstand 0.5 MPa pressure
Remote zero calibration function
PFA, fused quartz, and PTFE are used as materials for contact with fluids

For Semiconductor / LCD Manufacturing Processes Water Quality Meters
In-line Type Dissolved Ozone Monitor OZ-96i

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Products

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This dissolved ozone concentration monitor is able to cover a broad measuring range from low concentrations to high concentrations.

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The HF-960M uses sensors that offer outstanding corrosion resistance for high-precision, and is thus perfect for single-bath and wafer cleaning.

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Suitable for fluorinated acid density control in semiconductor manufacturing processes and in various kinds of industrial fields

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The HF-700 stabilizes hydrofluoric concentrations on the order of ppm in diluted sulfuric acid and hydrogen peroxide

TMAH Conductivity Meter
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IPA Resistivity Meter
IP-960

This meter enables IPA to be controlled to high purity to maintain and enhance the performance of IPA vapor (vapour) drying systems.

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