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	PLCA-800
	Specifications

Particle sensor

PLCA-800

Overview

The PLCA-800 is a sensor that counts the number of particulates in a wide variety of liquids used in semiconductor manufacturing processes. In the wet-cleaning process, a highly effective method of eliminating particles, sensors that can detect particles in liquids on a real-time basis have become indispensable. The PLCA-800 is ideal for in-line measurement of particles suspended in chemical baths.

Features

The sensor can be joined to the process device.

Particles as small as 0.1µm or 0.2µm in diameter can be detected (two types are available).

The PLCA-800 can perform in-line measurement, responding instantly to fine changes in the sample.

Specifications

Measurement principle: Laser scattering method (90? scattering)

Target sample: Particles suspended in chemical baths other than hydrofluoric acid

Cell material: Quartz glass

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