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Highly Sensitive Silica Monitor For Ultra-pure Water in Semiconductor Production Processes
SLIA-300
Satisfies the customer's demands for measuring the ultra-low density of silica at the finest sensitivity of 0.01 µg/L (0.01 ppb)
Overview
The ultra-pure water that is used in the semiconductor production processes can be further purified by using an ion-exchange resin. Capturing the silica that is dissolved from this ion-exchange resin as quickly as possible can control the ultra-pure water quality, which is important during the production processes.
HORIBA Advanced Techno has developed and employed a new "long light path length measurement cell" to enable highly sensitive measurement of ultra-low density silica and also realized a compact desktop model to improve the usability.
With a broad range of standard features such as self-diagnosis and new performance improvements such as high-speed response and high sensitivity, this product provides enhanced support for the pure water processes in the production of semiconductors.
Features
• High Sensitivity and High Reproducibility
| A long light path of approx. 1 m is secured by applying fiber optic technologies. This realizes high sensitivity that responds to ultra-low density. This product ensures the reproducible accuracy of the full scale ± 2% within the range from 0 to 2 µg/L during high-speed 5-minute measurement. |
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• Desktop Model Compact Design
| The flexible structure of the "long light path length measurement cell" also realizes a revolutionary compact design. This desktop model is available for various installation conditions such as small spaces. It is also available for mobile use. |
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• Reduced Consumption of Reagent to 1/5
| To reduce the consumption of reagent to 1/5 of the previous amount, the reaction cell has been improved and separated from the measurement cell. Also, the measurement cell has been changed to a tube type. Employing the "long light path length measurement cell" can reduce the running cost for reagents drastically. |
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• Reduced Consumption of Reagent by More Than Half
Reduced the consumption of not only the reagent but also the sample water.
By employing the "long light path length measurement cell," the consumption of expensive pure water (used as sample water) is reduced by 60%. The silica monitor from HORIBA Advanced Techno contributes to reduce the on-site costs. |
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• Self-Diagnosis Function That Monitors for Operation Errors
Performs self-diagnosis for operation errors such as sample water/reagent injection, calibration error, temperature monitoring in a cell, and light source error. When an error is found, a warning lamp is lit and a text message is displayed.
• Automatic Calibration to Realize Superior Maintainability
Zero calibration is always performed automatically to check for transmitted light and to calibrate the turbidity.
• Up to Six-Point Measurement Allowed (Optional)
Up to six measurement points can be set. A single unit can be used for multi-point measurement.
• Semi-permanent Light Source Employed: No Replacement Necessary
A monochromatic semiconductor light source, which provides a steady light volume and long life, is employed. It can be used as semi-permanent light source.
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