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SLIA-300
Long light path length measurement cell
Specifications

Highly Sensitive Silica Monitor For Ultra-pure Water in Semiconductor Production Processes

SLIA-300


Long Light Path Length Measurement Cell: Detects 0.01 µg/L at Minimum


The measurement cell has a double structure in which a light permeable fluorocarbon resin tube runs through a stainless steel pipe. The light coming in from one side of the pipe is repeatedly reflected in the pipe due to the difference of the refractive index between the fluorocarbon tube and the ambient air before reaching the other side.
This light transmission mechanism is an application of the optical fiber's high efficiency and low blockage principle, which realizes improved detection sensitivity and high reproducibility. (Patent pending)


This long light path length cell employs a flexible tube structure, enabling a small-footprint design. By storing the long cell of approx. 1 m in a desktop compact body, a small unit that is 1/8 the size of the previous model has been realized.
Also, the tube structure of the cell has a big advantage for reducing running costs: it reduces the consumption of color reagent and sample water to 1/5 and 1/2 of the previous amounts, respectively.

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For Semiconductor / LCD Manufacturing Processes Water Quality Meters
High-sensitivity Silica Monitor SLIA-300

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